MiniLine

                   In order to cope with fast experiments and limited space, SYSKEY has developed extremely small equipment for 2-inch glass and wafer substrates, we called “Mini Line”. Mini Line is a practical manufacturing system for small production. It is easier to produce the small number of components through higher heights, which is a new type of research and development that researchers expect.

                  For SYSKEY's Mini Line system, including thermal system、sputter system, PECVD, PEALD, RIE, ICP-RIE, E-beam. It can accurately control the process gas and monitor the data (pressure, substrate temperature), and provide high-quality films.