Park 3DM Series

Park 3DM Series
Automated Industrial AFM
for High-Resolution 3D Metrology
Innovation and Efficiency for 3D Metrology
Park Systems has introduced the revolutionary Park 3DM Series, the completely automated AFM system designed for overhang profiles, high-resolution sidewall imaging, and critical angle measurements. With the patented decoupled XY and Z scanning system with tilted Z-scanner, it overcomes the challenges of the normal and flare tip methods in accurate sidewall analysis. In utilizing our True Non-Contact Mode™, the Park 3DM Series enables non-destructive measurement of soft photoresist surfaces with high aspect ratio tips.
A fully automated industrial AFM using NX technology

Clean room compatible and fully automated for measurement and data analysis at the nanoscale level
NX technology automatically constructs an extremely accurate topographical image and collects essential dimensional data
The Industry leading,low noise Z-detector works on an independent, closed loop to minimize errors in topography (the “creep effect”)
True Non-contact™ mode allow for the collection of high resolution and accurate data without tip-sample damage, something that could otherwise cost you valuable time and money
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