High vacuum atomic force microscope
for failure analysis and atmosphere-sensitive materials research
Park NX-Hivac allows failure analysis engineers to improve the sensitivity and repeatability of their AFM measurements through high vacuum environment. Because high vacuum measurement offers greater accuracy, better repeatability, and less tip and sample damage than ambient or dry N2 conditions, users can measure a wider range of signal response in various failure analysis applications, such as dopant concentration of Scanning Spreading Resistance Microscopy (SSRM).
Park NX-Hivac enables materials scientific research that requires high accuracy and high resolution measurements in a vacuum environment free from oxygen and other agents.