Spectroscopic Ellipsometer for Thin Film Measurement

The Auto SE is a fully automated spectroscopic ellipsometer designed to make thin film measurement simple, fast, and reliable. With push-button operation, automatic sample handling, and powerful analysis software, it delivers accurate thickness, optical constants, and film uniformity results in just seconds. The Auto SE is the ideal turnkey solution for routine thin film characterization and device quality control across research and industrial applications.

• Simple Push-Button Operation – Fully automatic measurement and reporting with minimal user training required.
• Fast and Accurate – Measurements in under 2 seconds, covering 450–1000 nm with high accuracy and repeatability.
• MyAutoView Vision System – Ensures precise spot positioning, especially on transparent substrates, for reproducible results.
• Versatile Applications – Suitable for semiconductors, photovoltaics, displays, coatings, polymers, and biological thin films.
• Comprehensive Analysis – Provides film thickness (Å to 15 µm), optical constants (n, k), roughness, porosity, and bandgap energy.
• Flexible Spot Sizes & Mapping – Automatic spot selection and multi-site mapping for thin film uniformity assessment.
• Intelligent Software Integration – User-oriented Auto Soft for routine analysis, with DeltaPsi2 for advanced research and recipe development.
• Wide Accessory Range – Options include temperature-controlled cells, electrochemical cells, autosamplers, and curved sample mounts.
• Proven Reliability – Award-winning system with HORIBA’s global support network and certified quality assurance.

 

Spectroscopic Ellipsometry Solution

Spectroscopic Ellipsometers are optical thin film measurement tools for determining film thickness and optical constants (n,k) of thin film structures. They are widely used in the microelectronics, display, photonics, photovoltaics, lighting, optical and functional coatings, biotechnology industries.

Advantages of Ellipsometry

1. Non destructive technique
2. No sample preparation
3. Rapid measurement and simple to operate
4. No reference measurement needed
5. Very sensitive for ultra-thin film measurement down to 1Å
6. Single and multi layer thin film measurement
7. Information rich for layer stack description (interface, roughness, film gradient, film anisotropy etc…)
8. Direct and accurate determination of optical constants (n,k)

When compared with other optical metrology instruments the unique strengths of spectroscopic ellipsometers are based on their highly precise and simple experimental measurements plus physical and material information derived from optical constants characterization.