Atomic Force Microscope

Products & Solutions
                 Park Systems delivers advanced nanoscale metrology solutions across both research and industrial applications. Research AFMs feature a decoupled scanner architecture for distortion-free imaging, while True Non-Contact™ technology preserves tip and sample integrity. The AI-powered SmartScan streamlines operation, providing researchers with intuitive and high-resolution nanoscale measurements. Industrial AFMs are designed for automated, high-throughput environments, offering advanced 3D metrology and fully automated AFM solutions for semiconductor manufacturing, display technology, and quality assurance. In addition to AFMs, Imaging Spectroscopic Ellipsometry (ISE) enables high-resolution optical analysis of microstructured thin films, while White Light Interferometry (WLI) and nanoscale IR spectrometers (AFM-IR) further expand Park Systems’ metrology capabilities. Active Vibration Isolation (AVI) systems enhance measurement stability across both research and industrial applications, minimizing external disturbances to ensure the highest level of accuracy.

 

 


Park NX20 is equipped with unique features that make it easier to uncover the reasons behind device failure and develop more creative solutions. Its unparalleled precision provides high resolution data that lets you focus on your work, while its True Non-Contact™ mode scan keeps tips sharper and longer, so you won’t have to waste as much time and money replacing them

Park FX40 is Park Systems’ latest innovation in atomic force microscopy (AFM), designed for high-resolution imaging of small samples. With a low noise floor, minimal thermal drift, and enhanced mechanical stability, the FX40 delivers unmatched precision and reliability.

Like all Park AFMs, FX40 features an orthogonal scan system and True Non-contact™ mode, enabling accurate, high-resolution metrology, even on the most delicate or fragile samples.​

Park NX-HDM provides accurate sub-angstrom surface roughness measurements, scan after scan. Park NX-HDM, together with its industry’s lowest noise floor, and its unique True Non-Contact™ technology, it is the most accurate AFM for surface roughness measurement in the market.

Park XE7 has all the state-of-the-art technology you've come to expect from Park Systems, at a price your lab can afford. Designed with the same attention to detail as our more advanced models, the XE7 allows you to do your research on time and within budget.

Park NX12 is an all-in-one solution for nanoscale microscopy. It provides high-resolution imaging with diverse property measurement capabilities. It excels in electrochemistry research and is ideal for multi-user facilities serving a wide range of research disciplines. This adaptable platform covers a range of applications, from nanomechanical mapping, scanning ion conductance microscopy to inverted optical microscopy. Its flexibility is further enhanced by optional hardware and software add-ons, making it an ideal choice for analytical researchers and multi-user facility users.

Scanning Ion Conductance Microscopy (SICM) utilizes a pipette with a nanometer-scale aperture. The ion current between the inside and the outside of the pipette in aqueous solution changes depending on the distance from the nanopipette tip to the surface. The topography is acquired by using a feedback controller to hold the ion current constant.

Park NX-Hivac
High vacuum atomic force microscope
for failure analysis and atmosphere-sensitive materials research
Park NX-Hivac allows failure analysis engineers to improve the sensitivity and repeatability of their AFM measurements through high vacuum environment. Because high vacuum measurement offers greater accuracy, better repeatability, and less tip and sample damage than ambient or dry N2 conditions, users can measure a wider range of signal response in various failure analysis applications, such as dopant concentration of Scanning Spreading Resistance Microscopy (SSRM).

Park NX-3DM
Automated Industrial AFM for High-Resolution 3D Metrology
The innovative Park 3DM, an automated AFM system, excels in overhang profiles, sidewall imaging, and critical angle measurements with its unique decoupled XY and Z scanning and a tilted Z-scanner. It effectively addresses the limitations of normal and flare tip methods in sidewall analysis. The system's True Non-Contact Mode™ allows for non-destructive measurement of soft photoresist surfaces using high aspect ratio tips.

Park Systems' PTR Series is a fully automatic industrial in-line AFM solution for, but not limited to, automatic Pole Tip Recession measurements on Rowbar-level, individual Slider-level, and HGA-level sliders. With sub-nano scale accuracy, repeatability, and throughput, the PTR Series is the metrology tool of choice for Slider manufacturers to improve their overall production yield.




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