Spin Coater

SPIN PROCESSING WITH THE POLOS SPIN COATER


A spin coater is mostly used for creating thin films with thicknesses below 10 nm of even high quality thickness, using centripetal force. Typically you spinphotoresist on a spin coater, but the POLOS spin processor is also used for spin coating polymer thin films like blockcopolymers (BCP) as PDMS and PMMA, or as a low-cost sol–gel solution for spin-coated ZnO films.

WHEN IT COMES TO SPIN PROCESS APPLICATIONS...

All POLOS spin coaters are suitable to most typical spin process applications such as cleaning, rinse/dry, and coating. From low priced, inexpensive laboratory spin coaters SPIN150i or SPIN200i to POLOS Advanced single wafer spin coating equipment with multiple dispense lines, suitable for developingand etching. With over 2,000 coaters in the field, our bench top spin coaters and in-deck spin processor designs have proven themselves over the years for processing a wide range of substrates from small fragments up to diameter 450mm substrates or LCD or glass panels up to 900mm.

INFINITE SPIN PROCESSES...

Each Fab, each R&D or even each student in university employs different spin processes. POLOS spin coater equipment offer unlimited processes: intuitive programming on the touch screen controller, even USB up- or download from your own pc, if so preferred, with unlimited programs /steps and graphical representation. This makes the POLOS SPIN150i the best laboratory spin coater you can buy!

EASY ACCESS AND CLEAR VIEW OF YOUR SPIN COATING PROCESS?

See your process through the clear tempered glass spin coater lid. The lid hinge holds at optimum angle for Easy Access and for your safety lockselectromagnetically until the end of the spin coating process. The Vee-Lid ensures residual chemicals on the lid run safely to the system drain. A labyrinth seal protects the motor and control electronics from chemical contamination. The detachable keyboard with LAN cable makes it very suitable for use in a glove box.

UNIFORMITY OF SPIN COATING?

The Syringe Holder & Diffuser for N2 purge reduce air turbulence in the chamber. The digital motor speed controller enables accurate acceleration andstable rotations, both critical factors for coating uniformity.

THE RIGHT SPIN COATER MATERIALS FOR YOUR SPIN PROCESS?

For our spin coaters and chucks we use fine and stable alpha crystalline structure NPP (natural polypropylene). Where the application requires PTFE, we useTFM1600 material, superior for use with chemicals above standard PTFE. Check the chemical compatibility in our Spin Coater Base Material check list.                

Spin Coater Models
 
The SPIN150i is a Affordable Spin Coater and is suitable for processing fragments of 5mm up to Ø150mm/6 inch wafers (or Ø160mm substrates), or 4"x4" square substrates.

Available in Tabletop of In-Deck models for integration into your wetbench.
The POLOS SPIN-series standard comes with 3 I/O ports, to hook up with for example a foot-pedal for hands-free operation or dispense units. (Suitable for use in Glovebox.) 

 





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