Park XE15

The Park XE15 includes many unique capabilities that make it ideal for shared labs that handle a diverse range of samples, researchers doing multi variant experiments, and failure analysis engineers working on wafers. Its reasonable price and robust feature set also make it one of the best value large-sample AFMs in the industry.
The most convenient sample measurements with MultiSample™ scan
Park XE15 MultiSample™ scan system
Automated imaging of multiple samples in one pass
Specially designed multi-sample chuck for the loading of up to 16 individual samples
Fully motorized XY sample stage travels up to 150 mm x 150 mm
Using the motorized sample stage, MultiSample Scan™ enables programmable multiple region imaging in step-and-scan automation.

Here’s how it works:
1. Register multiple scan positions defined by a user
2. Image from the first scan position
3. Lift a cantilever
4. Move the motorized stage to the next user defined coordinate
5. Approach
6. Repeat scan

The registration of multiple scan positions are easily carried out by either entering sample-stage coordinates or sample de-skewing by two reference points. This automated feature greatly increases productivity by reducing the need for your interaction during the scan process.
Park XE15 Specifications
XY Scanner
Single-module flexure XY scanner with closed-loop control
Scan range : 100 µm × 100 µm
 
Motorized Stage
XY travel range : 150 mm × 150 mm, motorized 
Z travel range : 25 mm
Focus travel range : 20 mm, motorized
                                     Optional precision encoders for repeatable XY positioning
 
Z Scanner
Guided high-force Z scanner
Scan range : 12 µm
                       25 µm (optional)
Sample Mount
Sample size : Up to 150 mm
Thickness : Up to 20 mm
 
Vision
Direct on-axis vision of sample surface and cantilever
Coupled with 10× objective lens (20× optional)
Field-of-view : 480 × 360 µm
CCD : 1 Mpixel
 
Software
XEP
Dedicated system control and data acquisition software
Adjusting feedback parameters in real time
Script-level control through external programs(optional)
XEI
AFM data analysis software (running on Windows, MacOS X, and Linux)
 
Electronics
High performance DSP : 600 MHz with 4800 MIPS
Maximum 16 data images
Maximum data size : 4096 × 4096 pixels
Signal inputs : 20 channels of 16 bit ADC at 500 kHz samplings
Signal outputs : 21 channels of 16 bit DAC at 500 kHz settling
Synchronous signal : End-of-image, end-of-line, and end-of-pixel TTL signals
Active Q control (optional)
Cantilever spring constant calibration (optional)
CE Compliant
Power : 120 W
Signal Access Module (Optional)
 
AFM Modes
(*Optionally available)
Standard Imaging
True Non-Contact AFM
Basic Contact AFM
Lateral Force Microscopy (LFM)
Phase Imaging
Intermittent (tapping) AFM
Force Measurement*
Force Distance (FD) Spectroscopy
Force Volume Imaging
Dielectric/Piezoelectric Properties*
Electric Force Microscopy (EFM)
Dynamic Contact EFM (EFM-DC)
Piezoelectric Force Microscopy (PFM)
PFM with High Voltage
Mechanical Properties*
Force Modulation Microscopy (FMM)
Nanoindentation
Nanolithography
Nanolithography with High Voltage
Nanomanipulation
Piezoelectric Force Microscopy (PFM)
Magnetic Properties*
Magnetic Force Microscopy (MFM)
Optical Properties*
Tip-Enhanced Raman Spectroscopy (TERS)
Time-Resolved Photo Current Mapping (PCM)
Electrical Properties*
Conductive AFM
IV Spectroscopy
Scanning Kelvin Probe Microscopy (SKPM/KPM)
SKPM with High Voltage
Scanning Capacitance Microscopy (SCM)
Scanning Spreading-Resistance Microscopy (SSRM)
Scanning Tunneling Microscopy (STM)
Time-Resolved Photo Current Mapping (PCM)
Chemical Properties*
Chemical Force Microscopy with Functionalized Tip
Electrochemical Microscopy (EC-STM and EC-AFM)
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