The Park XE15 includes many unique capabilities that make it ideal for shared labs that handle a diverse range of samples, researchers doing multi variant experiments, and failure analysis engineers working on wafers. Its reasonable price and robust feature set also make it one of the best value large-sample AFMs in the industry.
The most convenient sample measurements with MultiSample™ scan Park XE15 MultiSample™ scan system Automated imaging of multiple samples in one pass Specially designed multi-sample chuck for the loading of up to 16 individual samples Fully motorized XY sample stage travels up to 150 mm x 150 mm Using the motorized sample stage, MultiSample Scan™ enables programmable multiple region imaging in step-and-scan automation.
Here’s how it works: 1. Register multiple scan positions defined by a user 2. Image from the first scan position 3. Lift a cantilever 4. Move the motorized stage to the next user defined coordinate 5. Approach 6. Repeat scan
The registration of multiple scan positions are easily carried out by either entering sample-stage coordinates or sample de-skewing by two reference points. This automated feature greatly increases productivity by reducing the need for your interaction during the scan process.
Park XE15 Specifications XY Scanner Single-module flexure XY scanner with closed-loop control Scan range : 100 µm × 100 µm
Motorized Stage XY travel range : 150 mm × 150 mm, motorized Z travel range : 25 mm Focus travel range : 20 mm, motorized Optional precision encoders for repeatable XY positioning
Z Scanner Guided high-force Z scanner Scan range : 12 µm 25 µm (optional) Sample Mount Sample size : Up to 150 mm Thickness : Up to 20 mm
Vision Direct on-axis vision of sample surface and cantilever Coupled with 10× objective lens (20× optional) Field-of-view : 480 × 360 µm CCD : 1 Mpixel
Software XEP Dedicated system control and data acquisition software Adjusting feedback parameters in real time Script-level control through external programs(optional) XEI AFM data analysis software (running on Windows, MacOS X, and Linux)
Electronics High performance DSP : 600 MHz with 4800 MIPS Maximum 16 data images Maximum data size : 4096 × 4096 pixels Signal inputs : 20 channels of 16 bit ADC at 500 kHz samplings Signal outputs : 21 channels of 16 bit DAC at 500 kHz settling Synchronous signal : End-of-image, end-of-line, and end-of-pixel TTL signals Active Q control (optional) Cantilever spring constant calibration (optional) CE Compliant Power : 120 W Signal Access Module (Optional)
AFM Modes (*Optionally available) Standard Imaging True Non-Contact AFM Basic Contact AFM Lateral Force Microscopy (LFM) Phase Imaging Intermittent (tapping) AFM Force Measurement* Force Distance (FD) Spectroscopy Force Volume Imaging Dielectric/Piezoelectric Properties* Electric Force Microscopy (EFM) Dynamic Contact EFM (EFM-DC) Piezoelectric Force Microscopy (PFM) PFM with High Voltage Mechanical Properties* Force Modulation Microscopy (FMM) Nanoindentation Nanolithography Nanolithography with High Voltage Nanomanipulation Piezoelectric Force Microscopy (PFM) Magnetic Properties* Magnetic Force Microscopy (MFM) Optical Properties* Tip-Enhanced Raman Spectroscopy (TERS) Time-Resolved Photo Current Mapping (PCM) Electrical Properties* Conductive AFM IV Spectroscopy Scanning Kelvin Probe Microscopy (SKPM/KPM) SKPM with High Voltage Scanning Capacitance Microscopy (SCM) Scanning Spreading-Resistance Microscopy (SSRM) Scanning Tunneling Microscopy (STM) Time-Resolved Photo Current Mapping (PCM) Chemical Properties* Chemical Force Microscopy with Functionalized Tip Electrochemical Microscopy (EC-STM and EC-AFM)